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25 Wafer Two-Stage
Vertical Transfer Machine
AVTX, where X is wafer size
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- Lowest price plastic to
quartz transfer possible without compromising quality.
- Wafer edge grip
technology and elimination of lifter comb minimize particles.
- Cassettes move, rather
than wafers, for safer transfer.
- No comb pivot points
above wafers help ensure cleanliness.
- Single button operation
makes unit very user-friendly.
- Available for all wafer
sizes of quartz and plastic cassettes up to 8-inch.
- Fifty wafer model
available on request from Custom Products Department.
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Amorphous Carbon Wafers
ACWX, where X is wafer size
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- Potential to save
millions of dollars in wafer cost over time due to low COO.
- Used as replacement for
dummy silicon wafers and thin film measurement wafers.
- Can last for years
without reclaiming. (AC wafers bought in 1998 are still in use today)
- Etching will not damage
wafers as amorphous carbon is impervious to acids and bases.
- No out gassing, as gases
and liquid cannot penetrate amorphous carbon wafers.
- Available in 150mm,
200mm and 300mm sizes.
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Improved
Cordless
Freedom WandTM
FWCR2
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- Stronger
vacuum pump can safely hold 200mm or 200mm wafers.
- Improved
power management increases run time 100% to 180 minutes.
- clean
and durable electronic actuation button lasts 100,000 cycles.
- Direct
connect to power supply feature allows FWCR to be used even with
discharged batteries.
- Tabletop/wall
mount charging stand keeps wands safe and secure when not in use.
- Ergonomic
wand handles make wafer handling safe and comfortable for operators.
- Each
unit certified Class 1 cleanroom compatible.
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Semiautomatic
SMIF Pod OpenerSMIFPOX,
where X is wafer size
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- Tabletop
unit opens all SMIF pods safely and smoothly.
- Retracts
and holds cover for easy access to cassette and safe clean storage
of cover.
- Dual
button operation (one to open and one to close) makes unit very
user-friendly.
- Base
lockdown minimizes the possibilities of accidental tipping of unit.
- An
economical alternative to SMIF load port openers.
- Small
footprint. (slightly larger than POD itself)
- Available
in 150mm and 200mm models.
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